Plasma Processing of Materials:

Scientific Opportunities and Technological Challenges

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Size: 88 pages, 8.5 x 11

Publication Year:1991

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PAPERBACK ISBN-10: 0-309-04597-5 ISBN-13: 978-0-309-04597-1	$30.75	Add to Cart

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Authors:
Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astonomy, National Research Council
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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world--electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines ...
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Table of Contents
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FRONT MATTER	i-xii	(skim)
1 SUMMARY, FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS	1-5	(skim)
2 PLASMA PROCESSING AND LOW-ENERGY PLASMA SCIENCE	6-12	(skim)
3 PLASMA PROCESSING IN THE ELECTRONICS INDUSTRY	13-36	(skim)
4 SCIENTIFIC FOUNDATION OF PLASMA PROCESSING	37-64	(skim)
5 EDUCATIONAL ISSUES	65-74	(skim)
APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS	75-76	(skim)

Description

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world--electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field.
The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Plasma Processing of Materials:

Scientific Opportunities and Technological Challenges

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