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Status: Available Now
Size: 106 pages, 8.5 x 11
Publication Year:1992
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PAPERBACK
ISBN-10: 0-309-04635-1
ISBN-13: 978-0-309-04635-0
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Authors:
Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, National Research Council Authoring Organizations
Description: Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials ... Read More
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