Lou Ann Heimbrook, Agere Systems, Chair

Christopher P.Ausschnitt, IBM Microelectronics Division

D.Keith Bowen, Bede Scientific, Inc.

James Duley, Hewlett-Packard Laboratories

Robert E.Ellefson, Leybold Inficon, Inc.

Katharine G.Frase, IBM Microelectronics Division

Michael E.Kahn, KLA-Instruments (retired)

Robert C.McDonald, Intel Corporation (retired)

David N.McQuiddy, TriQuint Semiconductor, Inc.

Lori S.Nye, Consultant, Mountain View, California

Edith Ong, Applied Materials, Inc.

Elsa Reichmanis, Bell Laboratories/Lucent Technologies

Gary S.Selwyn, Los Alamos National Laboratory

Peter W.Staecker, Consultant, Lexington, Massachusetts

Ned Tabat, Seagate Technology, LLC

Anne L.Testoni, KLA-Tencor Instruments

Larry F.Thompson, Ultratech Stepper, Inc.

Iwona Turlik, Motorola Advanced Technology Center

Submitted for the panel by its Chair, Lou Ann Heimbrook, this assessment of the fiscal year 2001 NIST activities in microelectronics is based on a formal meeting of the panel on April 19–20, 2001, in Gaithersburg, Md., and on documents provided by NIST.1


U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology, Silicon Microelectronics Programs at the National Institute of Standards and Technology: Programs, Activities and Accomplishments, NISTIR 6731, National Institute of Standards and Technology, Gaithersburg, Md., April 2001.

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