Lou Ann Heimbrook, Agere Systems, Chair
Christopher P.Ausschnitt, IBM Microelectronics Division
D.Keith Bowen, Bede Scientific, Inc.
James Duley, Hewlett-Packard Laboratories
Robert E.Ellefson, Leybold Inficon, Inc.
Katharine G.Frase, IBM Microelectronics Division
Michael E.Kahn, KLA-Instruments (retired)
Robert C.McDonald, Intel Corporation (retired)
David N.McQuiddy, TriQuint Semiconductor, Inc.
Lori S.Nye, Consultant, Mountain View, California
Edith Ong, Applied Materials, Inc.
Elsa Reichmanis, Bell Laboratories/Lucent Technologies
Gary S.Selwyn, Los Alamos National Laboratory
Peter W.Staecker, Consultant, Lexington, Massachusetts
Ned Tabat, Seagate Technology, LLC
Anne L.Testoni, KLA-Tencor Instruments
Larry F.Thompson, Ultratech Stepper, Inc.
Iwona Turlik, Motorola Advanced Technology Center
Submitted for the panel by its Chair, Lou Ann Heimbrook, this assessment of the fiscal year 2001 NIST activities in microelectronics is based on a formal meeting of the panel on April 19–20, 2001, in Gaithersburg, Md., and on documents provided by NIST.1
U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology, Silicon Microelectronics Programs at the National Institute of Standards and Technology: Programs, Activities and Accomplishments, NISTIR 6731, National Institute of Standards and Technology, Gaithersburg, Md., April 2001.