techniques for very-large-scale integrated circuits themselves. Similarly, it will require an era of spectacular advances in the development of processes to integrate nanoscale components into devices, both with other nanoscale components and with microscale and larger components, accompanied by the ability to do so reliably at low cost. New techniques for manufacturing massively parallel and fault-tolerant devices will have to be invented. Since nanoscale technology spans a much broader range of scientific disciplines and potential applications than does solid state electronics, its societal impact may be many times greater than that of the microelectronics and computing revolution.

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