1. The 300-mm development platform;

  2. Lithography;

  3. Innovative manufacturing processes;

  4. Next-generation gas and chemicals;

  5. Metrology development;

  6. Product testing; and

  7. Environmental issues.

The Motivation to Create Partnerships

Europe has a greater need for this kind of support than does a single large country like the United States. Europe is a patchwork of small- and medium-size economies, and each of them is more or less sub-critical in IC activities. However, Europe is not an easy place to form partnerships because of different languages, currencies, and cultures. Countries therefore need incentives to create partnerships, and MEDEA, serving as an information clearinghouse, provides those incentives by helping to arrange funding and partners. Most of the equipment and materials companies participating in MEDEA are small- and medium-size enterprises that can benefit from this kind of support.

As the follow-up program, MEDEA Plus begins in 2001, and the industry is once again supportive. The important research feature for MEDEA Plus, concluded Dr. Kamerbeek, is the enabling technologies charter. Most work in MEDEA Plus for the industry will focus on sub-100-nm research and development to help its participating companies toward the next generation of information technology.

Closing Remarks

Dr. Graham concluded the panel session and the symposium by thanking all participants, especially those who had traveled long distances to attend. He thanked the organizers again for a rich and educational program featuring excellent material and the participation of the leaders of the international information technology community.



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