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. "Appendix D: Environmental Considerations for Photovoltaics." The Power of Renewables: Opportunities and Challenges for China and the United States. Washington, DC: The National Academies Press, 2010.
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FIGURE D-1 Flow sheet of the modified Siemens process.
High purity SiHCl3 is prepared from quartz sand. The steps are as follows.
Preparation of industrial silicon: SiO2 + C → Si + CO2↑.
Preparation of SiHCl3: Si + HCl → SiHCl3 + H2↑, which produces a gas mixture of H2, HCl, SiHCl3, SiCl4, and Si.
Purification of SiHCl3 from the gas mixture.