FIGURE D-1 Flow sheet of the modified Siemens process.

FIGURE D-1 Flow sheet of the modified Siemens process.

Preparation and Purification of Trichlorosilane (SiHCl3)

High purity SiHCl3 is prepared from quartz sand. The steps are as follows.

  1. Preparation of industrial silicon: SiO2 + C → Si + CO2.

  2. Preparation of SiHCl3: Si + HCl → SiHCl3 + H2, which produces a gas mixture of H2, HCl, SiHCl3, SiCl4, and Si.

  3. Purification of SiHCl3 from the gas mixture.



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