Appendix

Participants in Workshop on Plasma Processing of Materials

J. Norman Bardsley, Lawrence Livermore National Laboratory

Kurt Becker, The City College of New York

David Benenson, State University of New York at Buffalo

Richard Buss, Sandia National Laboratories

Hugh Casey, Los Alamos National Laboratory

Philip Cosby, SRI International

Thomas Eddy, EG&G Idaho, Inc., INEL

Douglas W. Ernie, University of Minnesota

David Fraser, Intel

Valery Godyak, GTE Laboratories Inc.

John Herron, National Institute of Standards and Technology

Dale Ibbotson, AT&T Bell Laboratories

Peter Kong, EG&G Idaho, Inc., INEL

Charles Kruger, Jr., Stanford University

Vincent McCoy, California Institute of Technology

Bob McGrath, Sandia National Laboratories

P. A. Miller, Sandia National Laboratories

John Mucha, AT&T Bell Laboratories

Jerry Perrizo, Air Force Office of Scientific Research

Charles W. Roberson, Office of Naval Research

James Roberts, National Institute of Standards and Technology

Leon Shohet, University of Wisconsin

Mark Smith, Sandia National Laboratories

Iran Thomas, Department of Energy

Amy Wendt, University of Wisconsin

Claude Woods, University of Wisconsin



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Plasma Processing of Materials: Scientific Opportunities and Technological Challenges Appendix Participants in Workshop on Plasma Processing of Materials J. Norman Bardsley, Lawrence Livermore National Laboratory Kurt Becker, The City College of New York David Benenson, State University of New York at Buffalo Richard Buss, Sandia National Laboratories Hugh Casey, Los Alamos National Laboratory Philip Cosby, SRI International Thomas Eddy, EG&G Idaho, Inc., INEL Douglas W. Ernie, University of Minnesota David Fraser, Intel Valery Godyak, GTE Laboratories Inc. John Herron, National Institute of Standards and Technology Dale Ibbotson, AT&T Bell Laboratories Peter Kong, EG&G Idaho, Inc., INEL Charles Kruger, Jr., Stanford University Vincent McCoy, California Institute of Technology Bob McGrath, Sandia National Laboratories P. A. Miller, Sandia National Laboratories John Mucha, AT&T Bell Laboratories Jerry Perrizo, Air Force Office of Scientific Research Charles W. Roberson, Office of Naval Research James Roberts, National Institute of Standards and Technology Leon Shohet, University of Wisconsin Mark Smith, Sandia National Laboratories Iran Thomas, Department of Energy Amy Wendt, University of Wisconsin Claude Woods, University of Wisconsin

OCR for page 75
Plasma Processing of Materials: Scientific Opportunities and Technological Challenges This page in the original is blank.