Ex Situ Analysis

 

43

   

Plasma Generation and Transport

 

44

   

Low-Pressure Plasma Modeling

 

45

   

Analysis

 

45

   

Fluid Simulations

 

46

   

Particle-in-Cell and Kinetic Simulations

 

46

   

Thermal Plasma Modeling

 

47

   

Toward CAD Tools and Expert Systems

 

49

   

Chemical Kinetics

 

49

   

Multidimensional Modeling and Magnetic Effects

 

49

   

Stability of Processing Plasmas

 

50

   

Accuracy and Reliability of Numerical Simulation Methods

 

50

   

Plasma Diagnostics

 

51

   

Positive Ions and Neutrals

 

51

   

Electron Density and Energy Distribution

 

53

   

Fields

 

53

   

Negative Ions

 

53

   

Particulates

 

55

   

Reference Reactors

 

55

   

Data Base for Plasma Generation and Transport

 

55

   

Present Status

 

56

   

Needs

 

56

   

Distribution of Information

 

57

   

Plasma-Surface Interactions

 

57

   

Boundary Conditions

 

58

   

Passive Surfaces

 

59

   

Particulates

 

59

   

Microstructure Evolution

 

60

   

In Situ Analysis

 

60

   

Funding for Plasma Processing Research

 

61

   

Japanese Research

 

61

   

French Research

 

63

   

Findings and Conclusions

 

63

5

 

Educational Issues

 

65

   

Educational Requirements for Undergraduates

 

66

   

Laboratory Courses and the Scientific Method

 

67

   

Research Experiences and Cooperative Programs

 

67

   

U.S. Graduate Education

 

67

   

Texts and Computer-aided Instruction

 

69

   

Faculty Development

 

69

   

Continuing Education

 

69

   

Foreign Educational Offerings

 

70

   

Japan

 

70

   

France

 

71

   

Findings and Conclusions

 

72

 

 

Appendix: Participants in Workshop on Plasma Processing of Materials

 

75



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