1705

Tool Scale

Demetre Economou

1725

Feature Scale

Vivek Singh

1745

Summary Discussion

David Graves and Mark Kushner

1915

Dinner

0900

Introductory Remarks

David B. Graves and Mark J. Kushner, Co-chairs

0900

Database Needs: Electron Impact Processes

Jean W. Gallagher, National Institute of Standards and Technology

0930

Rate Constants of Heterogeneous Processes in Plasma-Assisted Processing

Gottlieb S. Oehrlein, SUNY Albany

1000

Status of Ion and Neutral Chemistry Databases

Mark J. Kushner, University of Illinois at Urbana-Champaign

1030

Break

1045

Thermodynamic and Excited State Data for Plasma Processing

Arthur V. Phelps, JILA

1115

Data Needs for Radiative Processes and Diagnostics

Alan Garscadden, Air Force Wright Laboratory

1145

Critical Evaluation and Dissemination of Plasma Databases

W. Lowell Morgan, Kinema Research and Software

1215

Lunch

1315

Breakout Sessions

Electron Impact Processes

Heterogeneous Processes

Ion Impact Processes and Neutral Chemistry

Thermochemistry of Reactive Species

Radiative Processes and Diagnostics

1445

Break

1500

Reports on Breakout Sessions

1500

Electron Impact Processes

Jean Gallagher

1520

Heterogeneous Processes

Gottlieb Oehrlein

1540

Ion Impact Processes and Neutral Chemistry

Mark Kushner

1600

Thermochemistry of Reactive Species

Arthur Phelps

1620

Radiative Processes and Diagnostics

Alan Garscadden

1640

Summary Discussion

David Graves and Mark Kushner

1800

Adjourn