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. "Front Matter." Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press, 1996.
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Condition of the Surface
35
Technology
36
Ultrahigh-Vacuum Approach Using Mass and Energy Selected Reactive Beams
Particle Beams
Sticking Coefficients
37
Synergistic Effects
Substrate Temperature Dependence
Angle Dependence
38
Computer Simulations
Findings
References
5 Electron Collision Processes
41
Introduction
Ionization
Atoms
Molecules
Theoretical Methods and Advances
42
Neutral Dissociation
Electron-Impact Excitation
43
Attachment
Momentum Transfer, Swarm, and Discharge Measurements
General Comments
44
45
6 Ion Processes, Neutral Chemistry, and Thermochemical Data
47
Cross Sections and Rate Coefficients
48
Ion Processes
Momentum Transfer
Ion-Molecule and Charge Exchange Reactions
Ion-Ion Neutralization
50
Electron-Ion Recombination
51
Ion-Neutral and Neutral-Neutral Excitation
Neutral Chemistry
Status of the Database
52
Excited State Chemistry and Penning Ionization
53
Summary
54
55
Thermochemical Data
57
Appendix A: Acronyms and Abbreviations
59
Appendix B: Workshop Agenda
61
Appendix C: Workshop Participants
63
