Condition of the Surface

 

35

   

Technology

 

36

   

Ultrahigh-Vacuum Approach Using Mass and Energy Selected Reactive Beams

 

36

   

Particle Beams

 

36

   

Sticking Coefficients

 

37

   

Synergistic Effects

 

37

   

Substrate Temperature Dependence

 

37

   

Angle Dependence

 

38

   

Computer Simulations

 

38

 

 

Findings

 

38

 

 

References

 

38

5
Electron Collision Processes

 

41

 

 

Introduction

 

41

 

 

Ionization

 

41

   

Atoms

 

41

   

Molecules

 

41

   

Theoretical Methods and Advances

 

42

   

Neutral Dissociation

 

42

 

 

Electron-Impact Excitation

 

43

 

 

Attachment

 

43

 

 

Momentum Transfer, Swarm, and Discharge Measurements

 

43

 

 

General Comments

 

44

 

 

Findings

 

45

 

 

References

 

45

6
Ion Processes, Neutral Chemistry, and Thermochemical Data

 

47

 

 

Introduction

 

47

 

 

Cross Sections and Rate Coefficients

 

48

   

Ion Processes

 

48

   

Momentum Transfer

 

48

   

Ion-Molecule and Charge Exchange Reactions

 

48

   

Ion-Ion Neutralization

 

50

   

Electron-Ion Recombination

 

51

   

Ion-Neutral and Neutral-Neutral Excitation

 

51

   

Neutral Chemistry

 

51

   

Status of the Database

 

52

   

Excited State Chemistry and Penning Ionization

 

53

   

Summary

 

54

   

Ion Processes

 

55

   

Neutral Chemistry

 

55

 

 

Thermochemical Data

 

55

 

 

Findings

 

57

 

 

References

 

57

Appendix A:
Acronyms and Abbreviations

 

59

Appendix B:
Workshop Agenda

 

61

Appendix C:
Workshop Participants

 

63



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