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Microelectromechanical Systems: Advanced Materials and Fabrication Methods (1997)

Chapter: Appendix A: World Wide Web Sites on MEMS

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Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
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APPENDICES

Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
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Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
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Appendix A
World Wide Web Sites on MEMS

Johnson, D., TiNi Alloy Company www.sma-mems.com

University of Wisconsin http://mems.engr.wisc.edu/moreinfo.html http://mems.isi.edu/archives/otherWWWsites.html

European Information Clearinghouse on Microsystem Technology http://mail.vdivde-it.de/ut/EMSTO

JTEC Panel Report on Microelectromechanical Systems in Japan http://itri.loyola.edu/MEMS/TOC.htm

The Electronics Subcommittee http://esc.sysplan.com/esc/index.html

Integrated Silicon Micro Optics in ETIS http://guernsey.et.tudelft.nl/

DIMES Delft Institute of Microelectronics and Submicron Technology http://muresh.et.tudelft.nl/dimes/index.html

JPL-CSMT Home Page http://mishkin.jpl.nasa.gov/CSMT_PAGE

ISI MEMS Clearinghouse http://mems.isi.edu/

Stanford Transducers Lab http://transducers.stanford.edu/

MTL Research Area-Microelectromechanical Devices http://goesser.mit.edu/MTL/Report94/MEMS/MEMS.html

Berkeley Sensor & Actuator Center http://www-bsac.eecs.berkeley.edu/

MEMS Related Sites http://cms.njit.edu/MEMSFolder/MEMSSites.html

JPL-MEMS on Internet http://www.jpl.nasa.gov/quality/nasa/mems.htm#MEMS

DARPA MEMS http://eto.sysplan.com/ETO/MEMS/

Analog Devices/MCNC iMEMS Server http://imems.mcnc.org/

MCNC MEMS Home Page http://mems.mcnc.org/

Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
×
Page 57
Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
×
Page 58
Suggested Citation:"Appendix A: World Wide Web Sites on MEMS." National Research Council. 1997. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: The National Academies Press. doi: 10.17226/5977.
×
Page 59
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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival—perhaps surpass—the societal impact of integrated circuits.

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