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PAPERBACK list:$26.00 Web:$23.40 add to cart Rights & Permissions Free PDF Access Free Resources Sign in to download PDF book and chapters PDF EXECUTIVE SUMMARY Display this book on your site! Related Titles Implications of Emerging Micro and Nanotechnology A Path to the Next Generation of U.S. Banknotes: Keeping Them Real Other Related Titles Microelectromechanical Systems: Advanced Materials and Fabrication Methods (1997) National Materials Advisory Board (NMAB) Web Search Builder Use this book's key terms to search within this book, across our collection, or across the Web. Skim This Chapter Skim this chapter and use this chapter's key terms to search within this book. Reference Finder Paste in your own text to find books that relate to your topic. Page 57   E-mail  Facebook  Digg  Stumble  Twitter More The following HTML text is provided to enhance online readability. Many aspects of typography translate only awkwardly to HTML. Please use the page image as the authoritative form to ensure accuracy. APPENDICES Page 57 Front Matter (R1-R14) Executive Summary (1-5) 1 Background (6-13) 2 Integrated Circuit-Based Fabrication Technologies and Materials (14-22) 3 New Materials and Processes (23-33) 4 Designing Microelectromechanical Systems (34-37) 5 Assembly, Packaging, and Testing (38-50) References (51-56) Appendix A: World Wide Web Sites on MEMS (57-59) Appendix B: Biographical Sketches of Committee Members (60-61)

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--> Appendix A World Wide Web Sites on MEMS Johnson, D., TiNi Alloy Company www.sma-mems.com University of Wisconsin http://mems.engr.wisc.edu/moreinfo.html http://mems.isi.edu/archives/otherWWWsites.html European Information Clearinghouse on Microsystem Technology http://mail.vdivde-it.de/ut/EMSTO JTEC Panel Report on Microelectromechanical Systems in Japan http://itri.loyola.edu/MEMS/TOC.htm The Electronics Subcommittee http://esc.sysplan.com/esc/index.html Integrated Silicon Micro Optics in ETIS http://guernsey.et.tudelft.nl/ DIMES Delft Institute of Microelectronics and Submicron Technology http://muresh.et.tudelft.nl/dimes/index.html JPL-CSMT Home Page http://mishkin.jpl.nasa.gov/CSMT_PAGE ISI MEMS Clearinghouse http://mems.isi.edu/ Stanford Transducers Lab http://transducers.stanford.edu/ MTL Research Area-Microelectromechanical Devices http://goesser.mit.edu/MTL/Report94/MEMS/MEMS.html Berkeley Sensor & Actuator Center http://www-bsac.eecs.berkeley.edu/ MEMS Related Sites http://cms.njit.edu/MEMSFolder/MEMSSites.html JPL-MEMS on Internet http://www.jpl.nasa.gov/quality/nasa/mems.htm#MEMS DARPA MEMS http://eto.sysplan.com/ETO/MEMS/ Analog Devices/MCNC iMEMS Server http://imems.mcnc.org/ MCNC MEMS Home Page http://mems.mcnc.org/

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dimes delft