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Plasma Processing and Processing Science
director to ensure coordination among the groups, and include an ongoing seminar series with external speakers designed to facilitate cooperation, communication, and interest among the participants.
The research program should be well balanced in terms of experimental and modeling efforts. It should strive toward establishing the knowledge base as well as the technology base for the chosen emerging technologies.
To establish and maintain contact with the mainstream of processing science, NRL should form collaborations with industry, universities, and other laboratories. NRL has had experience with setting up Cooperative Research and Development Agreements (CRADAs) and could use these as mechanisms for accomplishing the goal of increased collaboration. ( Chapter 2, Chapter 3, Chapter 4, Chapter 5, Chapter 6, Chapter 7 through Chapter 8, identify current academic, industrial, and federal laboratory efforts in the field.)
It is the judgment of the panel that NRL has sufficient facilities in place to enable it to play a key role in many important issues pertaining to the plasma processing of semiconductors in ultralarge-scale integrated (ULSI) manufacturing. It is also the panel's judgment that the first priority for NRL should be to intensify interactions with the outside world to understand the current issues and to gain insight on where to focus its efforts. NRL personnel should increase their involvement with the materials processing community by attending relevant conferences, presenting contributed papers, and seeking invitations to give invited papers. As NRL implements the recommendations of this panel and redirects its research thrusts in the area of plasma processing of materials, the Laboratory management and research team should be prepared for the period of learning, retraining, and reorganization that will be required for it to become a significant and respected element in the field. Chapter 9 offers specific conclusions on how NRL's capabilities in plasma physics, chemistry, surface science, and materials processing can be used to support the research program that is recommended in this report.