Plasma Processing and Processing Science

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Chapter 1–	Introduction and Summary	1
Chapter 2–	Modeling and Simulation of Plasma Processing	3
	Research Opportunities	3
	Requirements of the Microelectronics Fabrication Industry	3
	Current Status of Modeling and Simulation	4
	A Role for NRL	5
Chapter 3–	Semiconductor Processing	7
	Research Opportunities	7
	A Role for NRL	8
	Development and Characterization of Precompetitive Materials and Processes	8
	Comparative Analysis and Characterization of Tools and Processes in Development	10
	Sensor Development for Control and Fingerprinting of Manufacturing Processes	11
Chapter 4–	Plasma Deposition and Polymerization	13
	Research Opportunities	13
	Semiconductor Fabrication	13
	Barrier Coatings	13
	Fibrous Materials	13
	Optical Coatings and Photonics	14
	Plasma Polymerization	14
	A Role for NRL	14
Chapter 5–	Ion Implantation and Surface Modification	15
	Research Opportunities	15
	Introduction	15
	Plasma and Ion Beam Implantation Technology	15
	Applications	16
	A Role for NRL	18
Chapter 6–	Thermal Plasmas	19
	Research Opportunities	19
	Introduction	19
	Plasma Spraying	19
	Plasma Chemical Vapor Deposition	20
	Plasma Waste Destruction	20
	Plasma Metallurgy	21
	Thermal Plasma Synthesis	21
	Plasma Consolidation	22

Free Resources

Related Titles

Plasma Processing and Processing Science (1995)
Commission on Physical Sciences, Mathematics, and Applications (CPSMA)

Contents

Free Resources

Related Titles

Plasma Processing and Processing Science (1995) Commission on Physical Sciences, Mathematics, and Applications (CPSMA)

Contents

Plasma Processing and Processing Science (1995)
Commission on Physical Sciences, Mathematics, and Applications (CPSMA)