Contents

 Chapter 1–

 

Introduction and Summary

 

1

 Chapter 2–

 

Modeling and Simulation of Plasma Processing

 

3

   

 Research Opportunities

 

3

   

 Requirements of the Microelectronics Fabrication Industry

 

3

   

 Current Status of Modeling and Simulation

 

4

   

 A Role for NRL

 

5

 Chapter 3–

 

Semiconductor Processing

 

7

   

 Research Opportunities

 

7

   

 A Role for NRL

 

8

   

 Development and Characterization of Precompetitive Materials and Processes

 

8

   

 Comparative Analysis and Characterization of Tools and Processes in Development

 

10

   

 Sensor Development for Control and Fingerprinting of Manufacturing Processes

 

11

 Chapter 4–

 

Plasma Deposition and Polymerization

 

13

   

 Research Opportunities

 

13

   

 Semiconductor Fabrication

 

13

   

 Barrier Coatings

 

13

   

 Fibrous Materials

 

13

   

 Optical Coatings and Photonics

 

14

   

 Plasma Polymerization

 

14

   

 A Role for NRL

 

14

 Chapter 5–

 

Ion Implantation and Surface Modification

 

15

   

 Research Opportunities

 

15

   

 Introduction

 

15

   

 Plasma and Ion Beam Implantation Technology

 

15

   

 Applications

 

16

   

 A Role for NRL

 

18

 Chapter 6–

 

Thermal Plasmas

 

19

   

 Research Opportunities

 

19

   

 Introduction

 

19

   

 Plasma Spraying

 

19

   

 Plasma Chemical Vapor Deposition

 

20

   

 Plasma Waste Destruction

 

20

   

 Plasma Metallurgy

 

21

   

 Thermal Plasma Synthesis

 

21

   

 Plasma Consolidation

 

22



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