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Plasma Processing of Materials: Scientific Opportunities and Technological Challenges (1991)

Chapter: APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS

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Suggested Citation:"APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS." National Research Council. 1991. Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: The National Academies Press. doi: 10.17226/1875.
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Appendix

Participants in Workshop on Plasma Processing of Materials

J. Norman Bardsley, Lawrence Livermore National Laboratory

Kurt Becker, The City College of New York

David Benenson, State University of New York at Buffalo

Richard Buss, Sandia National Laboratories

Hugh Casey, Los Alamos National Laboratory

Philip Cosby, SRI International

Thomas Eddy, EG&G Idaho, Inc., INEL

Douglas W. Ernie, University of Minnesota

David Fraser, Intel

Valery Godyak, GTE Laboratories Inc.

John Herron, National Institute of Standards and Technology

Dale Ibbotson, AT&T Bell Laboratories

Peter Kong, EG&G Idaho, Inc., INEL

Charles Kruger, Jr., Stanford University

Vincent McCoy, California Institute of Technology

Bob McGrath, Sandia National Laboratories

P. A. Miller, Sandia National Laboratories

John Mucha, AT&T Bell Laboratories

Jerry Perrizo, Air Force Office of Scientific Research

Charles W. Roberson, Office of Naval Research

James Roberts, National Institute of Standards and Technology

Leon Shohet, University of Wisconsin

Mark Smith, Sandia National Laboratories

Iran Thomas, Department of Energy

Amy Wendt, University of Wisconsin

Claude Woods, University of Wisconsin

Suggested Citation:"APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS." National Research Council. 1991. Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: The National Academies Press. doi: 10.17226/1875.
×
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Suggested Citation:"APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS." National Research Council. 1991. Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: The National Academies Press. doi: 10.17226/1875.
×
Page 75
Suggested Citation:"APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS." National Research Council. 1991. Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: The National Academies Press. doi: 10.17226/1875.
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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world—electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field.

The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

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