Database Needs for Modeling and Simulation of Plasma Processing

Database Needs for Modeling and Simulation of Plasma Processing

(1996)

Print-On-Demand
74 pages | 8.5 x 11
978-0-309-05591-8

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Print-On-Demand
74 pages | 8.5 x 11
978-0-309-05591-8

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Authors

Panel on Database Needs in Plasma Processing, National Research Council

Suggested Citation

National Research Council. Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press, 1996.

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