Skip to main content

An Assessment of the National Institute of Standards and Technology Center for Nanoscale Science and Technology Fiscal Year 2011 (2011) / Chapter Skim
Currently Skimming:

4 The NanoFab Program
Pages 18-21

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
Select key terms on the right to highlight them within pages of the chapter.


From page 18...
... Enable the processing and characterization of a wide range of nanoscale materials, structures, and devices critical to the nation's measurement and technology needs; and 3. Foster internal collaborations in nanotechnology across NIST's laboratories and foster external collaborations with NIST's partners through its shared environment.13 This NanoFab mission statement is consistent with the CNST mission statement goals of operating a national, shared-use facility for nanoscale fabrication and for developing innovative nanoscale fabrication capabilities supporting researchers from industry, academia, NIST, and other government agencies.
Read the entire page →
From page 19...
... QUALITY OF RESEARCH AND FACILITIES The NanoFab clean-room facility has an impressive array of the most modern commercially available tools for micro- and nanofabrication. The physical facility is excellent, with a clean room and other laboratory space configured for easy access to a wide suite of modern fabrication tools.
Read the entire page →
From page 20...
... Future planning goals for the NanoFab program include the installation of three new tools critical for lithography, patterning, and planarization improvements in the clean room during 2011; new tooling justifications in the area of liftoff processing for 2012; improvement in tool uptime, especially for the Vistec e-beam writer; and continued outreach activities to attract more industry users. Future planning discussed during the review did not address staffing needs, which may ultimately limit productivity and new user participation in the NanoFab clean room.
Read the entire page →
From page 21...
... The CNST should pursue IP protection where appropriate. Specifically, some processing accomplishments in the NanoFab facility are of sufficient merit to warrant IP discussions -- for example, (1)
Read the entire page →

Key Terms

  • nanofabrication laboratory
  • nanoscale fabrication
  • future planning
  • nist researchers
  • nanofab program

  • process integration
  • nanofab clean
  • fabrication tools
  • cnst mission
  • processing activities

  • mission statement
  • fabrication capabilities
  • industry users
  • nanofab staffing
  • nanofab user

  • nanofab mission
  • laboratory process
  • cnst technical
  • postdoctoral research
  • research engineers

  • nanofabrication user
  • research mission
  • laboratory facilitates
  • nanofab manager
  • process engineers

  • laboratory processing
  • process training
  • liftoff processing
  • nanofabrication technologies
  • nanofab mode


    • This material may be derived from roughly machine-read images, and so is provided only to facilitate research.
    More information on Chapter Skim is available.