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Research Opportunities for Materials with Ultrafine Microstructures (1989) / Chapter Skim
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Pages 29-29

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From page 29...
... In addition to the high degree of precision and control of the distribution of the implanted species, which may be any element in the periodic table, ion implantation is a nonequilibrium process that can be used to make new materials, including metastable crystalline and amorphous materials on surfaces. An increasing effort is being directed toward applications of ion implantation to the fabrication of semiconductor devices, corrosion and wear-resistant surfaces, and high-temperature superconducting thin films.
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Key Terms

  • ion implantation
  • thin films
  • thin film
  • surface engineering
  • nonequilibrium process

  • implanted species
  • submicron scale
  • incident ion
  • whereby energetic
  • ion loses

  • severely limited
  • future impact
  • initial kinetic
  • maximum concentration


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