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An Assessment of the National Institute of Standards and Technology Physical Measurement Laboratory Fiscal Year 2015 (2016) / Chapter Skim
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3 Engineering Physics Division
Pages 18-22

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From page 18...
... The group advances measurement science to accelerate the commercialization and manufacture of high-performance and reliable electron devices for the electronics industry by developing new characterization techniques, physics-based models, and data analysis methods. The group develops the advanced metrology tools to enable quantitative and mechanistic assessment of reliability issues in emerging electronic devices.
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From page 19...
... The nanoelectronic device metrology subgroup seeks to develop measurements that quantify physical processes and electronic properties and to manipulate such processes and properties to enable innovation through entirely new functionality. An example is the projects in is click chemistry, which expands molecular electronics to molecules that do not self-assemble, allowing the build-up of complex molecular layers and electrode variety and adding new functionality at well-designed nanometer distances and concentrations.
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From page 20...
... Surface and Nanostructure Metrology The Surface and Nanostructure Metrology Group consists of 14 research staff and 12 guest researchers. The group project teams focus on optical methods for 3D nanostructure metrology; nanostructured optics and optical surface metrology; forensic topography and surface metrology; traceable scanning probe nanocharacterization; atom-based metrology; and atomically precise electronic devices.
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From page 21...
... calibration laboratories. They have also refocused their metrology service efforts on developing primary calibration devices aimed at the rapidly growing, multibillion-dollar MEMS industry for microphones and inertial sensors.
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From page 22...
... is unique and located inside carefully controlled environments. DISSEMINATION OF OUTPUTS The Nanolectronics Group has a solid publication record.
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Key Terms

  • novel devices
  • guest researchers
  • surface metrology
  • dimensional metrology
  • metrology subgroup

  • measurement science
  • nanostructured optics
  • semiconductor industry
  • scanning probe
  • nanoscale metrology

  • device metrology
  • optical surface
  • atomically precise
  • primary calibration
  • electronic devices

  • optical methods
  • optical spectroscopy
  • electronics subgroup
  • nanoelectronic device
  • dimensional calibrations

  • traceable scanning
  • calibration services
  • subwavelength line
  • forensic topography
  • molecular layers

  • developed test
  • novel nanostructured
  • advanced metrology
  • probe nano
  • provides advanced


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