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Microelectromechanical Systems Advanced Materials and Fabrication Methods (1997) / Chapter Skim
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1 Background
Pages 6-13

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
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From page 6...
... Like any other developing field, MEMS' commercial successes coexist with less mature products that have yet to establish a customer base (e.g., optical-mirror arrays for display purposes, microphotonic switching devices, actuated
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From page 7...
... The orifice plate of the print head is made of plated nickel laminated on top of a polymer barrier layer. Although producing this arrangement requires a departure from purely lithographic batch processing, the lamination process has been demonstrated to be cost effective for the large volumes demanded by the inkjet market.
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From page 8...
... Fingers extend laterally from the movable seismic mass perpendicular to the sensitive axis. Other fingers fixed to the substrate reach between the ADVANCED MATERIALS AND FABRICATION METHODS FOR MICROELECTROMECHANICAL SYSTEMS Tethe' points FIGURE 1-3 Schematic illustration of the sensing element of the ADXLSO accelerometer.
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From page 9...
... Several other concepts for accelerometers (e.g., Ford Motor Company's silicon-on-glass torsional accelerometer [Spangler and Kemp, 19951 end Motorola' s family of silicon capacitive micromachined accelerometers [Ristic et al., 19931) also rely on dual-chip approaches (e.g., Figure 1-5~.
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From page 10...
... Source: Hornbeck, 1995. Alternative MEMS display technologies are under industrial development elsewhere (e.g., Silicon Light Machines in the United States and Daewoo in Korea)
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From page 12...
... ...... _ 1-9 Poe MEWS ~ mon:ilor ~ condition of He body remotely and acidly Replaced BEERS device to Lease cold doses of medicine.
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From page 13...
... Biomedical and Health Care In addition to using MEMS to reduce the high costs associated with diagnostic testing, researchers are investi~ating using MEMS to sense the condition of the body and actuate implanted reservoirs to release controlled doses of medicines (Figure 1-9~. Portable MEMS-based analytical instruments are under development that will enable commu 13 nication and control with remote locations and permit the exchange of information with remotely located experts.
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Key Terms

  • sensing element
  • accelerometer chip
  • commercial successes
  • active electronics
  • mirror array

  • seismic mass
  • silicon chip
  • mems technologies
  • pressure sensors
  • mirror layer

  • layer removed
  • using mems
  • contain mechanical
  • release controlled
  • display screen

  • controlled doses
  • fabrication processes
  • air bags
  • dmd chip
  • mems devices

  • dotted line
  • electronic devices
  • crash sensor
  • simultaneously increasing
  • weights below

  • diagnostic testing
  • actuate implanted
  • completed dmd
  • product realization
  • drop weights


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