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Microelectromechanical Systems Advanced Materials and Fabrication Methods (1997) / Chapter Skim
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Executive Summary
Pages 1-5

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From page 1...
... The expertise and advanced state of the current microelectronics industry provides an enormous advantage for the development of MEMS. Leveraging and extending existing IC tools, materials, processes, and fabrication techniques is an excellent strategy for producing MEMS with
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From page 2...
... No comparable resource has been established for MEMS, however. For example, although a great deal is known about the electrical properties of polysilicon thin films, not much is known about their micromechanical properties or about specific details of the long-term reliability of mechanically stressed polysilicon or the surface mechanics related to friction, wear, and stress-related failure.
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From page 3...
... Stiction can also occur during the operation of actuated MEMS if shock, electrostatic discharge, or other stimuli cause moving components to touch either each other or to touch another surface. The MEMS operating environment and the interfaces of this environment on individual MEMS devices can influence performance.
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From page 4...
... Thus, several standardprocess MEMS foundries would have to be available and accessible, as well as custom, flexible fabrication facilities for users who require access and manipulation of the process to produce and optimize their products. The committee recognizes that realizing the concept of MEMS foundries may be difficult because many commercial companies have difficulty seeing "what's in it for them." Besides the danger of compromising proprietary know-how, companies offering a foundry service will have to commit to specific processes and reasonable turnaround schedules.
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From page 5...
... To facilitate the entry of practicing engineers into the field, opportunities to learn material that is special to MEMS should be encouraged through stimulating short courses and specialized text materials. For engineering undergraduates entering MEMS, programs and industrial procedures should tee encouraged that stimulate multidisciplinary university education and enhance the skill and knowledge base of those training for or contributing to the development of MEMS.
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Key Terms

  • mems devices
  • mechanical properties
  • fabrication processes
  • test devices
  • standard test

  • mems foundries
  • practicing engineers
  • mems materials
  • micromechanical properties
  • establishing standard

  • contact forces
  • fabrication facilities
  • foundry infrastructure
  • recommendation calls
  • producing mems

  • processing techniques
  • mechanical devices
  • strategic investment
  • commercial level
  • individual mems

  • short courses
  • advanced materials
  • mechanical structures
  • nonelectronic signals
  • drying process

  • frictional effects
  • projected applications
  • amorphous silicon
  • electronic world
  • address questions


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