An Assessment of the National Institute of Standards and Technology Physics Laboratory Fiscal Year 2008 (2008) / Chapter Skim
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Electron and Optical Physics Division
Electron and Optical Physics Division
Pages 19-25
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From page 19... ...
Projects Several current and future projects in this division that illuminate its core competencies, its connections inside and outside NIST, and its participation in various funding mechanisms are highlighted below. A major focus of the division concerns optical and source metrologies associated with the nation's effort to develop photolithography in the EUV regime at the 13 nm wavelength.
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From page 20... ...
The SURF IIIbased EUV program is a common ingredient of significant utility in all of these disciplines, and it increasingly acts as a focal point for EUV activities at NIST. The division should continue active pursuit of more collaborations and connections to the growing industrial base focused on EUV lithography and a NIST EUV effort, to couple existing expertise in all of these areas.
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From page 21... ...
This program, which was developed in part with resources provided under the America COMPETES Act, appears to be well coupled to quantum physics groups across the Physics Laboratory, and as the NIST quantum information effort matures, this program should be a valuable component. The extent to which the quantum telecommunications team is connected to research outside of NIST is of concern; that is, at the moment its quantum communication testbed seems to be used almost exclusively for internal NIST research (in rather sharp distinction with most of the other activities of the division)
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From page 22... ...
A commercial vendor exists that promises a product with performance comparable to a good bend-magnet line at a synchrotron radiation facility. Motivations for developing such a facility include developing metrology for an emerging tool that might have broad application, particularly in medical diagnostics and therapies; developing in-house x-ray microscopy and tomography capability; and spearheading a service to a broad spectrum of users around the NIST laboratories.
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From page 23... ...
Technical Merit Relative to State of the Art The unique and state-of-the-art capabilities of the division include the following: • The precision reflectometry of large-area and large NA multilayer-coated EUV optics for at-wavelength testing and characterization; • The provision of transfer standard EUV photodiodes and the development of cryogenic radiometric capability, which improved calibration accuracy by an order of magnitude; • The primary national standard for source-based optical radiometry in the EUV regime; • The integration of EUV optical measurements with surface analytical capabilities; and • The high-rate testbed for secure quantum encryption key distribution (in free space)
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From page 24... ...
Several workshops in the EUV technology area have been organized. Programs Funded Under the America COMPETES Act The Electron and Optical Physics Division participated in two projects, discussed above, that received funding under the America COMPETES Act.
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From page 25... ...
How can the quantum telecommunications laboratory serve the greater research community beyond NIST?
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