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APPENDIX F: EXAMPLES OF MULTICHIP MODULES
Pages 127-134

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From page 127...
... These were based on figures found in the literature] and sketches furnished by IBM and the General Electric Company.
From page 129...
... CERAMIC Sl CON SUBSTRATE (METALLIZED) MULLITE \ Figure F-1 Ceramic package developed by Hitachi for Silicon Substrate.
From page 130...
... l ID OOGOOOO0Q oomO 8~9 Of ~ lOO.~Q OOW.~.Q ouoosauua nnn~F,~n~rn / ~ Figure F-4 Three-dimensional assembly of GaAs modules developed by NEC. (After Johnson*
From page 131...
... _ rCMOS EPOXY POLYIMIDE COPPER tOVER SILICON) Figure F-S Multichip module developed by Toshiba.
From page 132...
... COVER ASSEMBLY ~ 132 ~ JACKET on ~ ~HELIUM FILL PORT ~,[ LSI CHIPPED 1 FLANGE:~~9Omm x 90mm CYLINDER~CC SUBSTRATE BASE PLATE Figure F-6 Thermal condition module developed by IBM. (Courtesy of IBMCorp.
From page 133...
... 133 -1/0 PlN 80ND ~ PWR / GND / =._~'w-~ - ' ~1 i_ Air KOVAR I~ ALUMINA CANSUBSTRAT FRAME Figure F-7 Cross section of GE modul E (Courtesy of General Electric Co.)


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