Plasma Processing and Processing Science (1995) / Chapter Skim
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Chapter 2--Modeling and Simulation of Plasma Processing
Chapter 2--Modeling and Simulation of Plasma Processing
Pages 3-6
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reactors can be responsible for producing desirable passivation layers on the sidewalls of trenches. Relevant plasma equipment models must therefore have the capability of including complex plasma chemistry.
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Fluid models have the advantage of being relatively mature and often borrow numerical techniques from similar models developed for fusion and combustion. They suffer from the inability to produce kinetic information, such as energy distributions of ions.
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These groups include Sanciia National Laboratories, Lawrence Livermore National Laboratory, IBM T.J. Watson Research Center, Auburn University, University of California at Berkeley, University of Houston, University of Illinois, University of Wisconsin, Eindhoven University (Netheriancts)
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Los Alamos National Laboratory is currently negotiating a CRADA with Semiconductor Research Corporation to perform similar modeling with emphasis on feature scale issues ant! may team with one of the other national laboratories.
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