Plasma Processing and Processing Science (1995) / Chapter Skim
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Pages 33-37
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From page 33... ...
In Chapters 2 through 8, research opportunities are presented in the specific areas of modeling and simulation of plasma processing, semiconductor processing, plasma deposition and polymerization, ion implantation ant! surface mollification, thermal plasmas, flat pane!
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From page 34... ...
The ECR too} can be easily adapted to other materials and should be able to make significant contributions rapidly. At a later time, the use of alternate high-density plasma tools may be studied for diamond film deposition.
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From page 35... ...
plasma processing, and almost no work on this subject yet exists. NRL currently has at least one expert on display technology, and his experience can be utilized for this task.
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