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Beam Technologies for Integrated Processing (1992) / Chapter Skim
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1 INTRODUCTION
Pages 1-2

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... This capability makes these technologies candidates for components in the integration of materials processing technologies. The potential for shorter lead times, higher productivity, and improved quality, reliability, and performance makes process integration an attractive opportunity.
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From page 2...
... Therefore, a study is required in this area similar to that for the engineered materials. Examples of integrated materials processing using beam processing are reviewed, followed by a discussion of the needs and barriers for further integration.
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Key Terms

  • integrated processing
  • integrated process
  • process integration
  • microelectronic manufacturing
  • engineered materials

  • lead times
  • process control
  • various beam
  • performance makes
  • primary thrust

  • materials monolayer
  • controlled gaseous
  • successful incorporation
  • fabrication line
  • doubt lead

  • attractive opportunity
  • beam processing
  • compound semiconductors
  • shorter lead
  • information processing

  • generating nanosize
  • using beam
  • sensor technology
  • beam process
  • unique properties

  • surface modifications
  • additional requirements
  • optoelectronic applications
  • prepare diamond
  • originally conceived


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