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Beam Technologies for Integrated Processing (1992) / Chapter Skim
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7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION
Pages 81-84

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From page 81...
... This has required not only development of processing tools with the requisite cleanliness but also increasingly cleaner rooms in which the equipment is housed. Each incremental improvement drives up the cost of a fabrication facility to the point where a new state-of-the-art facility costs in excess of $500 million.
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From page 82...
... Achieving integrated processing requires elimination of the numerous inspections that are now carried out to ensure that only "good" wafers are carried forward in the fabrication process. These inspections are now necessary to minimize the cost of processing unacceptable wafers and assure the proper functioning of the various process steps.
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From page 83...
... Nevertheless, it is recognized that modular integrated processes offer the opportunity to achieve process upgrades by changing modules rather than building whole new factories. In addition, for small fabrication runs, software-controlled flexibility would allow fewer tools to do a broader range of processes.
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Key Terms

  • process steps
  • process control
  • fabrication facility
  • simulation models
  • process simulation

  • factory environment
  • integrated processes
  • achieving integrated
  • beam technologies
  • artificial intelligence

  • control network
  • silicon wafers
  • load lock
  • proper functioning
  • requires elimination

  • beam processing
  • appropriate noninvasive
  • deposition steps
  • processing requires
  • liquid steps

  • semiconductor processing
  • various energy
  • integrated process
  • overhead items
  • silicon device

  • overall costs
  • estate occupied
  • improvement drives
  • lithography stations
  • numerous inspections


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