National Academies Press: OpenBook
« Previous: COLLOIDAL SYNTHESIS
Suggested Citation:"REACTIVE SPUTTERING." National Research Council. 1989. Research Opportunities for Materials with Ultrafine Microstructures. Washington, DC: The National Academies Press. doi: 10.17226/1488.
×
Page 25
Suggested Citation:"REACTIVE SPUTTERING." National Research Council. 1989. Research Opportunities for Materials with Ultrafine Microstructures. Washington, DC: The National Academies Press. doi: 10.17226/1488.
×
Page 26

Below is the uncorrected machine-read text of this chapter, intended to provide our own search engines and external engines with highly rich, chapter-representative searchable text of each book. Because it is UNCORRECTED material, please consider the following text as a useful but insufficient proxy for the authoritative book pages.

SYNTHESIS AND PROCESSING: GENERAL METHODS 25 particles increases with the development of an electrostatic repulsive barrier around the particles. From a practical point of view, the conditions corresponding to the upper and the lower ends of this diagram must be avoided to obtain high packing densities in the casts and to minimize drying shrinkages. The middle range is the most suitable for the preparation of high-concentration slips that can be converted to high-packing-density casts with a minimum amount of shrinkage. One effective way of developing sufficient repulsive interaction between particles in concentrated colloidal dispersions without increasing the hydrodynamic radius is through the steric repulsion of polymeric protective coatings. Industrial practice has shown that polyelectrolytes are especially useful in achieving this goal in aqueous systems. The nucleation of particle clusters and their networks as hierarchically clustered structures takes place in all size ranges. The extent of the hierarchy determines the overall packing density of the system. Recent studies have shown that, when suspended particles are first coated with lubricating surfactants, it is possible to form close- packed structures (Figure 8). This promising approach needs to be generalized in its applications to a variety of multiphase systems. To achieve lower sintering temperatures and a minimum amount of grain growth, the size of the voids must be minimized during forming. Some of the most commonly used forming techniques are not suitable for this purpose. Slip-and tape-casting techniques that use filtration as the basic consolidation mechanism fall into this category. In contrast, techniques such as extrusion and injection molding, which result in shear deformation, yield a relatively narrow pore size distribution because of the restructuring of particle clusters during the forming operation. A narrow pore or particle size distribution may not always be the most effective route to densification. Appropriate multimodal size distributions of particles can provide an alternative path toward densification. REACTIVE SPUTTERING Reactive sputtering is a versatile technique capable of synthesizing a broad class of materials. Thin films of virtually any metal (Ag, Ti, Mo, etc.) or elemental dielectric (Si, Ge, etc.) can be deposited by sputtering from a source of the same material using Ar or Kr inert gas. Addition of a reactive gas such as O2, N2, or H2 to the Ar or Kr permits deposition of oxides, nitrides, and hydrides from metallic or elemental dielectric sources. For example, a Si source can be used with Ar, Ar + O2, Ar + N2, or Ar + H2 to deposit thin films of Si, SiO2, Si3N4, and Si:H alloys. Compared to conventional evaporative techniques for depositing thin films, sputtering generally provides improved control over the properties of

SYNTHESIS AND PROCESSING: GENERAL METHODS Figure 8 (a) Fractal clusters of 15-nm gold particles that result in the formation of low-density compacts; (b) the dense packing of the same gold particles after they are first coated with lubricating surfactants. (Reprinted by permission of Elsevier Science Publishing Co., Inc. from Better Ceramics Through Chemistry III, by C. J. Brinker, P. E. Clark, and 26 D. R. Ulrich, eds., Material Research Society Proceedings, 1988.)

Next: CRYOCHEMICAL SYNTHESIS. »
Research Opportunities for Materials with Ultrafine Microstructures Get This Book
×
 Research Opportunities for Materials with Ultrafine Microstructures
Buy Paperback | $45.00
MyNAP members save 10% online.
Login or Register to save!
Download Free PDF

Materials with nanoscale structure (i.e. a structure of less than 100 nanometers in size) represent a new and exciting field of research. These materials can be produced in many ways, possess a number of unique properties compared with coarser-scaled structures, and have several possible applications with significant technological importance. Based on a state-of-the-art survey of research findings and commercial prospects, this new book concludes that much work remains to be done in characterizing these structures and their exceptional properties, and presents recommendations for the specific research and development activities needed to fill these gaps in our understanding.

READ FREE ONLINE

  1. ×

    Welcome to OpenBook!

    You're looking at OpenBook, NAP.edu's online reading room since 1999. Based on feedback from you, our users, we've made some improvements that make it easier than ever to read thousands of publications on our website.

    Do you want to take a quick tour of the OpenBook's features?

    No Thanks Take a Tour »
  2. ×

    Show this book's table of contents, where you can jump to any chapter by name.

    « Back Next »
  3. ×

    ...or use these buttons to go back to the previous chapter or skip to the next one.

    « Back Next »
  4. ×

    Jump up to the previous page or down to the next one. Also, you can type in a page number and press Enter to go directly to that page in the book.

    « Back Next »
  5. ×

    To search the entire text of this book, type in your search term here and press Enter.

    « Back Next »
  6. ×

    Share a link to this book page on your preferred social network or via email.

    « Back Next »
  7. ×

    View our suggested citation for this chapter.

    « Back Next »
  8. ×

    Ready to take your reading offline? Click here to buy this book in print or download it as a free PDF, if available.

    « Back Next »
Stay Connected!